Comparison of the structures of evaporated and ion-implanted amorphous silicon samples

Comparison of the structures of evaporated and ion-implanted amorphous silicon samples

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Date

Title

Comparison of the structures of evaporated and ion-implanted amorphous silicon samples

Authors

Pusztai, László
Kugler, Sándor

Type

folyóiratcikk

ISSN, e-ISSN

0953-8984
1361-648x

Periodical Volume

17

Container Title

JOURNAL OF PHYSICS-CONDENSED MATTER

Gender

szakcikk

Cite this item: http://hdl.handle.net/10890/1699

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