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Atomistic simulation of the bombardment process during the BEN phase of chemical vapor deposition (CVD) of diamond

Date

Type

folyóiratcikk

ISSN, e-ISSN

0925-9635

Periodical Number

3-6

Periodical Volume

11

Container Title

DIAMOND AND RELATED MATERIALS

Gender

szakcikk

OOC works

Abstract

Description

Keywords