High Density Nanostructure Fabrication with Electron Beam Lithography

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- BME PA dokumentumai [3731]
- Title
- High Density Nanostructure Fabrication with Electron Beam Lithography
- Author
- Szabó, Zsolt
- J M Lee
- M A Mohammad
- K van Dalfsen
- M Aktary
- M Stepanova
- S K Dew
- Date of issue
- 2008
- Language
- en
- Identifiers
- MTMT: 2681040
- Title of the container document
- Proceeding of the 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN)
- Document type
- egyéb konferenciaközlemény
- Document genre
- konferenciaközlemény