High Density Nanostructure Fabrication with Electron Beam Lithography

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URI
http://hdl.handle.net/10890/4571
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Title
High Density Nanostructure Fabrication with Electron Beam Lithography
Author
Szabó, Zsolt
J M Lee
M A Mohammad
K van Dalfsen
M Aktary
M Stepanova
S K Dew
Date of issue
2008
Language
en
Identifiers
MTMT: 2681040
Title of the container document
Proceeding of the 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN)
Document type
egyéb konferenciaközlemény
Document genre
konferenciaközlemény