Mechanical Study of a Micro-Machined Flexible Substrate

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http://hdl.handle.net/10890/3658

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Title: Mechanical Study of a Micro-Machined Flexible Substrate
Author: Berényi, Richárd
Date of issue: 2009
Publisher: IEEE
Language: en
Identifiers: MTMT: 2647063
Title of the container document: Electronic Devices and Systems Conference
Document type: egyéb konferenciaközlemény
Document genre: konferenciaközlemény