Contactless characterization of MEMS devices using optical microscopy

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URI
http://hdl.handle.net/10890/3341
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Title
Contactless characterization of MEMS devices using optical microscopy
Author
Timár, András
Bognár, György
Date of issue
2009
Publisher
IEEE Computer Society Press
Language
en
Identifiers
MTMT: 2640510
Scopus: 70349332832
Web of Science: 000267364000045
Title of the container document
Proceedings of the 12th IEEE workshop on Design & Diagnostics of Electronic Circuits & Systems (DDECS '09)
ISBN, e-ISBN
978-1-4244-3339-1
Document type
könyvrészlet
Document genre
konferenciaközlemény