Contactless characterization of MEMS devices using optical microscopy

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- BME PA dokumentumai [3731]
- Title
- Contactless characterization of MEMS devices using optical microscopy
- Author
- Timár, András
- Bognár, György
- Date of issue
- 2009
- Publisher
- IEEE Computer Society Press
- Language
- en
- Identifiers
- MTMT: 2640510
- Scopus: 70349332832
- Web of Science: 000267364000045
- Title of the container document
- Proceedings of the 12th IEEE workshop on Design & Diagnostics of Electronic Circuits & Systems (DDECS '09)
- ISBN, e-ISBN
- 978-1-4244-3339-1
- Document type
- könyvrészlet
- Document genre
- konferenciaközlemény