Simulation of Comb Drive for Fracture Lifetime Measurements

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Link to refer to this document:
http://hdl.handle.net/10890/2783
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Title
Simulation of Comb Drive for Fracture Lifetime Measurements
Author
Somlay, Gergely László
Szűcs, Zoltán
Poppe, András
Kerecsen Istvánné Rencz, Márta
Date of issue
2007
Language
en
Identifiers
MTMT: 2622054
Title of the container document
Proceedings of the 6th Electronic Circuits and Systems Conference (ECS'07)
Document type
egyéb konferenciaközlemény
Document genre
konferenciaközlemény