Simulation of Comb Drive for Fracture Lifetime Measurements

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Title: Simulation of Comb Drive for Fracture Lifetime Measurements
Author: Somlay, Gergely László; Szűcs, Zoltán; Poppe, András; Kerecsen Istvánné Rencz, Márta
Date of issue: 2007
Language: en
Identifiers: MTMT: 2622052
Title of the container document: COMSOL Users Conference 2007
Document type: egyéb konferenciaközlemény
Document genre: konferenciaközlemény