Vibration combined high temperature cycle tests for capacitive MEMS accelerometers

Thumbnail
View/Open
Metadata
Show full item record
Link to refer to this document:
http://hdl.handle.net/10890/2551
Collections
Title
Vibration combined high temperature cycle tests for capacitive MEMS accelerometers
Author
Szűcs, Zoltán
Nagy, Gergely
Hodossy, Sándor
Kerecsen Istvánné Rencz, Márta
Poppe, András
Date of issue
2007
Language
en
Identifiers
MTMT: 2613657
Scopus: 48049116911
Web of Science: 000254073600045
Title of the container document
Proceedings of the 13th International Workshop on THERMal INvestigations of ICs and Systems (THERMINIC'07)
Document type
egyéb konferenciaközlemény
Document genre
konferenciaközlemény