CAD Tools and Foundries to Boost Microsystems Development

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http://hdl.handle.net/10890/2383
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Title
CAD Tools and Foundries to Boost Microsystems Development
Author
Courtois B
Karam JM
Lubaszewski M
Székely, Vladimir
Kerecsen Istvánné Rencz, Márta
Hofmann K
Glesner M
Date of issue
1998
Language
en
Identifiers
MTMT: 2606981
Scopus: 0032000190
Web of Science: 000072728800052
Title of the container document
MATERIALS SCIENCE AND ENGINEERING B - SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Volume of container document
51
Number of container document
1-3
ISSN, e-ISSN
0921-5107
Document type
folyóiratcikk
Document genre
szakcikk