Comparison of the structures of evaporated and ion-implanted amorphous silicon samples

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Title: Comparison of the structures of evaporated and ion-implanted amorphous silicon samples
Author: Pusztai, László; Kugler, Sándor
Date of issue: 2005
Language: en
Identifiers: MTMT: 144515; Scopus: 24344496950; Web of Science: 000229222200014
Title of the container document: JOURNAL OF PHYSICS-CONDENSED MATTER
Volume of container document: 17
ISSN, e-ISSN: 0953-8984; 1361-648x
Document type: folyóiratcikk
Document genre: szakcikk