Atomistic simulation of the bombardment process during the BEN phase of chemical vapor deposition (CVD) of diamond

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Title
Atomistic simulation of the bombardment process during the BEN phase of chemical vapor deposition (CVD) of diamond
Author
Koháry, Krisztián
Kugler, Sándor
Hajnal, Zoltán
Kohler T
Frauenheim T
Katai S
Deak P
Date of issue
2002
Language
en
Identifiers
MTMT: 1122793
Scopus: 0036508286
Web of Science: 000176046300047
Title of the container document
DIAMOND AND RELATED MATERIALS
Volume of container document
11
Number of container document
3-6
ISSN, e-ISSN
0925-9635
Document type
folyóiratcikk
Document genre
szakcikk